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Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics Softcover reprint of the original 1st ed. 2014 edition
Pilar Gonzalez Ruiz
Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics Softcover reprint of the original 1st ed. 2014 edition
Pilar Gonzalez Ruiz
Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS.
199 pages, 144 Illustrations, color; XVI, 199 p. 144 illus. in color.
Media | Książki Paperback Book (Książka z miękką okładką i klejonym grzbietem) |
Wydane | 8 sierpnia 2015 |
ISBN13 | 9789401781404 |
Wydawcy | Springer |
Genre | Aspects (Academic) > Science / Technology Aspects |
Strony | 199 |
Wymiary | 155 × 235 × 12 mm · 3,34 kg |
Zobacz wszystko od Pilar Gonzalez Ruiz ( np. Paperback Book i Hardcover Book )