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Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics 2014 edition
Pilar Gonzalez Ruiz
Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics 2014 edition
Pilar Gonzalez Ruiz
Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS.
216 pages, 144 black & white illustrations, biography
Media | Książki Hardcover Book (Książka z twardym grzbietem i okładką) |
Wydane | 30 lipca 2013 |
ISBN13 | 9789400767980 |
Wydawcy | Springer |
Strony | 199 |
Wymiary | 155 × 235 × 14 mm · 480 g |
Zobacz wszystko od Pilar Gonzalez Ruiz ( np. Hardcover Book i Paperback Book )