Powiedz znajomym o tym przedmiocie:
Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings
B J Pawlak
Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings
B J Pawlak
The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
319 pages, illustrations
Media | Książki Hardcover Book (Książka z twardym grzbietem i okładką) |
Wydane | 17 października 2008 |
ISBN13 | 9781605110400 |
Wydawcy | Materials Research Society |
Strony | 319 |
Wymiary | 152 × 228 × 23 mm · 566 g |
Redaktor | Law, M. (University of Florida) |
Redaktor | Pawlak, B. J. |
Redaktor | Pelaz, M. L. (Universidad de Valladolid, Spain) |
Redaktor | Surugo, K. |
Zobacz wszystko od B J Pawlak ( np. Paperback Book i Hardcover Book )