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Glow-discharge Hydrogenated Amorphous Silicon - Advances in Solid State Technology (Closed) 1990 edition
K. Tanaka
Glow-discharge Hydrogenated Amorphous Silicon - Advances in Solid State Technology (Closed) 1990 edition
K. Tanaka
A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin
277 pages, biography
Media | Książki Hardcover Book (Książka z twardym grzbietem i okładką) |
Wydane | 30 listopada 1989 |
ISBN13 | 9780792303091 |
Wydawcy | Kluwer Academic Publishers |
Strony | 277 |
Wymiary | 156 × 234 × 17 mm · 585 g |
Język | English |
Redaktor | Tanaka, Kazuyoshi |
Zobacz wszystko od K. Tanaka ( np. Hardcover Book )